DESK V TSC HP With Etch

Sputter

Shutter and Std. Plate Includes a Full Range High Vacuum Gauge and mechanical pump (target not included)

6” (diameter) x 6” (high) Pyrex cylinder

Mechanical pump, two-stage rotary vane, (DV-85N-250) with filter, 3 cfm

Vent Valve: electric valve

 Inficon PSG 500 Pirani gauge transmitter (NW16 flanging; main chamber)

Interfaced to system process controller

2.0” diameter, sputter source

DC capability

Configuration: sputter down

Clamp target compatibility

High Voltage Concepts 50 Watt regulated DC power supply

Interfaced to system process controller

Gas inlet with needle valve control and positive shutoff valve

2.0” Etch assembly with adjustable height provisions

Interfaced to system process controller

Substrate shutter

 Options

Film Thickness Monitor

Vacuum Pump

Carbon Rod Evaporation Accessory

Gold Target-2.375” Diameter, .002” Thick

Gold Target – 60mm Diameter x 0.1mm Thick

Silver Target- 50 x 50 mm, 0.004” Thick