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Glass Processing Room: 100 mm x 130 mm IDxH
Sample Bench Size: ID 40 mm, support to put max. 6 sample cups
Vacuum System: Direct Rotary Vane Vacuum Pump 1L/s
Vacuum Testing: Pirani gauge
Vacuum Protection: 20 Pa, With the work of micro -pneumatic valve vacuum adjustment
Processing Room Media Gas: Air or argon, Equipped with argon inlet and a dedicated micro -pneumatic regulator
Gold Target: 1 Piece diameter: 58 mm
Tags: sputter, sputtering system