PECVD (PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION) systems are one of the coating systems used in Li-ion battery studies, graphene-based studies, and R&D studies, especially thin-film studies.

PECVD systems, which have plasma generators, provide the opportunity to perform surface activation or surface cleaning by exposing the materials to plasma before or during the heat treatment.

Optosense PECVD Systems is a complete system consisting of a tube furnace, 2-4 channel MFC unit, plasma generator, and vacuum pump. Each component of the system is designed to be added to each other later. Therefore, your heat treatment processes, which started with the tube furnace, can be converted into a CVD system with the MFC unit can be added later.  Also, it can convert to a PECVD system with the plasma system to be added later.