• MTI Spin Coater

compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use. 

Structure

Aluminum casting case to keep spinning stable

The liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions

Drainage outlet and vacuum pump connector are on the back panel

One filter is included in the standard package. It is used to connect the coater for preventing wastewater flowing into the pump

One oil-less vacuum pump is included in the standard package, 

Chamber  & Vacuum Chuck 

Chamber Diameter: 145 mm

3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'')

1 piece of adhesive tape(6"W x 24"L) is included  for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)

Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular  ( 5x5, or 10x10mm) or irregular shape.

Vacuum Pump

One 120L/min Oilless Vacuum Pump is included. 

Vacuum grade rubber pipe is included for immediate use.

Spin Speed 

Digital control panel with TWO programmable segments for different spin times and speeds

Spinning speed: 500 - 8000 RPM  

Liquid Injecting

20mL syringe is used to contain the coating material

The syringe holder height can be adjusted and rotated freely along the support rod

Input Power
110VAC or 220VAC please select the voltage in the options bar (10A fuse)
Motor Power
24V DC motor with 150W Max. 
Product Dimensions
13''(L) x 10''(W) x 8.5''(H)
Net Weight
15 kg (33 lbs)
Spin TimeSpinnning Time: 1 - 60s 



MTI Spin Coater

  • Product Code: 1
  • Availability: In Stock
  • $3,790.00

  • Ex Tax: $3,790.00

Tags: Midas Spin Coater, spin coater, döner kaplama, Fotorezist kaplama, thin film kaplama, ince film kaplama