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MFC systems are flow controllers that allow one or more gas flows to be dosed separately in specified amounts and fed to a system or environment. Mass flow controllers (MFC systems) are available in two different versions, digital mass flow controllers and needle valve mass flowmeters.
With the Optosense MFC systems provided by our company, the quantities of more than one different gas can be determined and the resulting gas mixture can be easily integrated into CVD, PECVD tube furnaces, plasma systems, vacuum chambers, and all other analytical systems with the gas inlet. Optosense MFC systems have 2-6 channels and the flow rate of each channel is calibrated specifically for the gas. These systems can be controlled quite easily via the Touch LCD or LED screen.
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